The above "Wordle" is made with the titles of all my publications.

The complete list of all the publications I authored and co-authored.

The complete list of all the publications I wrote as first author.
Statistics and citation indices for my publications are available on my Google Scholar profile page.

Publications by topic

EUV Lithography

Astronomical Instrumentation
LIDAR Remote Sensing

Other Cool Optics

Recent presentations

  • SPIE Photomask Technology 2018 - "Experimental evaluation of EUV pellicles impact on reticle imaging" [PPTX]
  • SPIE Advanced Lithography 2018 - "Actinic inspection of logic patterns using coherent diffraction imaging at high NA" [PPTX]
  • EUVL Symposium 2017 - "Actinic inspection of programmed defects on arbitrary patterns" [PPTX]
  • SPIE Advanced Lithography 2017 - "RESCAN: An actinic lensless microscope for defect inspection of EUV reticles" [PDF]
  • EUVL Symposium 2016 - "Lensless Actinic Inspection of EUV Reticles with RESCAN" [PDF] - [PPTX]