SMILE 2
SMILE 2 is the official image metrology software for the PSI EUV resist screening program. It was developed to provide a simple tool for the measurement of
SEM images line and space patterns and contact arrays. SMILE can measure LWR, LER and correlation length of line/space images.
It can measure contact-holes array images and display various contact-related metrics.
SMILE is still under development and some of its features are still experimental. For any question or comments, please contact me by
email.
To cite SMILE in a publication, please refer to this paper:
Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, Yasin Ekinci, "Contacts and lines SEM image metrology with SMILE," Proc. SPIE 11855, Photomask Technology 2021, 1185502 (27 September 2021); DOI: 10.1117/12.2600911
Installers and source code download
The zip archives include the installer files, a few test images for lines/space patterns and contact/hole patterns and the corresponding parameter files.
If the installer will check the presence of the MATLAB runtime and, if it doesn't find it, will prompt the user to download it before completing the installation process.
| Version |
OS |
Development status |
Description |
Release date |
| SMILE 2.3.2 |
Windows 10 |
Stable |
Can export the average PSD data. Added a "Batch mode" checkbox to process multiple subfolders automatically.
| 2023/07/25 |
| SMILE 2.3.1 source code |
MATLAB 2022a |
Stable |
For MATLAB 2022a |
2023/07/04 |
| SMILE 2.2.0 |
Windows 10 |
Beta |
Improvements to the GUI. Exporting PSD and lines profiles now possible. Can run without Admin privileges.
| 2022/07/28 |
| SMILE 2.2.0 source code |
MATLAB 2021b |
Beta |
For MATLAB 2021b |
2022/07/28 |
| SMILE 2.1.1 |
Windows 10 |
Stable |
Official image metrology software for the PSI EUV resist screening program |
2022/02/22 |
| SMILE 2.1.1 |
macOS 12.1 (M1) |
Stable |
Official image metrology software for the PSI EUV resist screening program |
2022/02/22 |
| SMILE 2.1.1 source code |
MATLAB 2021b |
Stable |
For MATLAB 2021b |
2022/02/22 |
| SMILE 2.1.1 source code |
MATLAB 2021a |
Stable |
For MATLAB 2021a |
2022/02/22 |
