SMILE 2.1 is the official image metrology software for the PSI EUV resist screening program. It was developed to provide a simple tool for the measurement of
SEM images line and space patterns and contact arrays. SMILE can measure LWR, LER and correlation length of line/space images.
It can measure contact-holes array images and display various contact-related metrics.
SMILE is still under development and some of its features are still experimental. For any question or comments, please contact me by email.
To cite SMILE 2.1 in a publication, please refer to this paper:
Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, Yasin Ekinci, "Contacts and lines SEM image metrology with SMILE," Proc. SPIE 11855, Photomask Technology 2021, 1185502 (27 September 2021); DOI: 10.1117/12.2600911
Installers and source code download
The zip archives include the installer files, a few test images for lines/space patterns and contact/hole patterns and the corresponding parameter files.
If the installer will check the presence of the MATLAB runtime (9.11) and, if it doesn't find it, will prompt the user to download it before completing the installation process.