The above "Wordle
" is made with the titles of all my publications.
The complete list of all the publications I authored and co-authored.
The complete list of all the publications I wrote as first author.
Publications by topic
SPIE Photomask Technology 2018 - "Experimental evaluation of EUV pellicles impact on reticle imaging" [PPTX]
SPIE Advanced Lithography 2018 - "Actinic inspection of logic patterns using coherent diffraction imaging at high NA" [PPTX]
EUVL Symposium 2017 - "Actinic inspection of programmed defects on arbitrary patterns" [PPTX]
SPIE Advanced Lithography 2017 - "RESCAN: An actinic lensless microscope for defect inspection of EUV reticles" [PDF]
EUVL Symposium 2016 - "Lensless Actinic Inspection of EUV Reticles with RESCAN" [PDF] - [PPTX]