SMILE 1.0

SMILE 1.0 is the official image metrology software for the PSI EUV resist screening program. It has been developed to extract critical dimension (CD) and line width roughness (LWR) data from SEM images of line and spaces arrays generated through EUV interference lithography. If you need to cite SMILE 1.0 in a publication, please refer to this paper:

Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, Yasin Ekinci, "Open-source software for SEM metrology," Proc. SPIE 11518, Photomask Technology 2020, 115180G (13 October 2020); DOI: 10.1117/12.2573154

SMILE 2.0

The new version of SMILE can measure LWR, LER and correlation length of line/space images. It can measure contact-holes array images and display various contact-related metrics. SMILE 2.0 has also an improved GUI. Please remember that SMILE 2.0 is still under testing. To cite SMILE 2.0 in a publication, please refer to this paper:

Iacopo Mochi, Michaela Vockenhuber, Timothée Allenet, Yasin Ekinci, "Contacts and lines SEM image metrology with SMILE," Proc. SPIE 11855, Photomask Technology 2021, 1185502 (27 September 2021); DOI: 10.1117/12.2600911

Installers and source code download

Version OS Development status Description Release date
SMILE 1.0 Windows 10 Stable Official image metrology software for the PSI EUV resist screening program 2021/10/03
SMILE 1.0 source code MATLAB 2021a Stable 2021/10/03
SMILE 2.0 Windows 10 Alpha L/S and contact analysis. Fixed issue with single line detection. 2021/10/16
SMILE 2.0 source code MATLAB 2021a Alpha Fixed issue with single line detection. 2021/10/16

Test images and parameter files download

Download link
Line/Space test images and parameter files
Contact/holes test images and parameter files